Industry also called clean room clean room, clean room (Clean Room), clean rooms, air pollutants refers to the space within a certain range of particles and harmful air, bacteria and other exclusions, and the temperature of the room, cleanliness , room pressure, air velocity and air distribution, noise, vibration and lighting, static control within a range of needs, particularly given the design of the room while. That is, regardless of how changes in the external air conditions, and its interior could have maintained all requirements originally set cleanliness, temperature, humidity and pressure characteristics of performance.
First, particulates cleanliness ISO_14644 clean room and clean area selected out of rank
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Greater than or equal to the size of the table is considered the maximum concentration limits ( pc / m 3 air concentration limit of 3.2 according to the formula) |
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0.1μm |
0.2μm |
0.3μm |
0.5μm |
1μm |
5μm |
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ISO Class 1 |
10 |
2 |
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ISO Class 2 |
100 |
24 |
10 |
4 |
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ISO Class 3 |
1000 |
237 |
102 |
35 |
8 |
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ISO Class 4 |
10000 |
2370 |
1020 |
352 |
83 |
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ISO Class 5 |
100,000 |
23700 |
10200 |
3520 |
832 |
29 |
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ISO Class 6 |
1000000 |
237000 |
102000 |
35200 |
8320 |
293 |
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ISO Class 7 |
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352000 |
83200 |
2930 |
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ISO Class 8 |
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3520000 |
832000 |
29300 |
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ISO Class 9 |
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35200000 |
8320000 |
293000 |
| Note: Due to the uncertainty involved in the measurement process, helping to determine the concentration level required level using three valid data. | ||||||
Two, clean workshop purification principle
Airflow⇒Early effect of air purification⇒Air conditioning⇒The effect of air purification⇒Fan blower⇒Pipeline⇒HEPA Air Purifier⇒Clean room⇒Blown dust bacteria and other⇒Return air shutters⇒Fresh air, the early effect of air filters
Repeat the above process, you can reach the purpose of purification.
Three routes flow clean room requirements:
Four, industrial clean room temperature and humidity range
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Room nature |
Temperature (oc) |
Humidity (%) |
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Winter |
Summer |
Winter |
Summer |
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Production processes are temperature and humidity requirements of cleanroom |
Determined by the production process requirements |
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No cleanroom production process temperature and humidity requirements |
20-22 |
24 ~ 26 |
30 ~ 50 |
50 ~ 70 |
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Purification and living room with staff |
16 ~ 20 |
26 ~ 30 |
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Five, air flow patterns and air volume (static)
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Air cleanliness Grade |
Air flow patterns |
The average wind speed(M / s) |
ACH (H-1) |
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1-4 |
Unidirectional flow |
0.3 ~ 0.5 |
- |
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5 |
Unidirectional flow |
0.2 ~ 0.5 |
- |
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6 |
Non-unidirectional flow |
- |
50 ~ 60 |
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7 |
Non-unidirectional flow |
- |
15 ~ 25 |
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8-9 |
Non-unidirectional flow |
- |
10 ~ 15 |
Six, clean room pressure control
1, the space around the clean room and must maintain a certain pressure, and shall determine the production process to maintain a positive pressure or negative pressure difference.
2, the pressure of different levels of clean rooms and clean area and clean area between not less than 5Pa, clean area with outdoor pressure should not be less than 10Pa.
3, clean room pressure required to maintain the value of the different amount of wind pressure, according to the characteristics of the clean room, the gap should be determined using the method or the ACH method.
4, the opening and closing air, return air and exhaust systems shall be interlocked. Positive pressure clean room interlock program for the first start the blower, and then start back fan and exhaust fan; closed interlock program should be the opposite.
Cleanroom vacuum interlock program with the above positive pressure clean room opposite.
5, non-continuous operation of the clean room, according to the production process requirements set duty air and purify the air conditioning should be handled.
Seven, limit noise spectrum (empty state)
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Octave sound |
63 |
125 |
250 |
500 |
1000 |
2000 |
4000 |
8000 |
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Non-unidirectional flow |
79 |
70 |
63 |
58 |
55 |
52 |
50 |
40 |
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Unidirectional flow, mixed flow |
83 |
74 |
68 |
63 |
60 |
57 |
55 |
54 |
Eight, purify the air conditioning system duct velocity requirements
1, the total duct is 6 ~ 10m / s.
2, no delivery, return air duct branch is 4 ~ 6m / s.
3, delivery, return air duct branch is 2 ~ 5m / s.