Since it electronically as a light source, and using electromagnetic imaging lens to make converged in recent years, the rise of a new science - electron optics. So an electron microscope with a new look appears to provide mankind with a powerful weapon progress in the microscopic world and to the high-tech field. Study various electron microscopy (TEM, SEM, Auger electron microscopy, scanning tunneling electron microscopy), electron probe, various surface analyzers and electronic beam lithography, electron beam annealing devices, manufacturing and exploitation is very active, has deep into all areas of microelectronics technology, the development of microelectronics technology plays a huge role.
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optical microelectronics cleanroom application examples |
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ISO cleanliness class level |
air flow patterns |
average wind speed (m / s) |
air volume per unit area (m3/m2.h) |
application examples |
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2 |
unidirectional flow pattern |
0.3-0.5 |
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lithography, semiconductor technology area |
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3 |
unidirectional flow pattern |
0.3-0.5 |
/ |
workspace, semiconductor technology area |
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4 |
unidirectional flow pattern |
0.3-0.5 |
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workspace, multi-mask process, dense disk of semiconductor manufacturing service area, dynamic area |
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5 |
unidirectional flow pattern |
0.2-0.5 |
/ |
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6 |
non-unidirectional flow pattern |
0.1-0.3 |
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dynamic area, multi-technology, semiconductor service area |
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unidirectional flow or non-unidirectional |
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70-160 |
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7 |
non-unidirectional flow pattern |
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30-70 |
service area |
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unidirectional flow or non-unidirectional |
/ |
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8 |
non-unidirectional flow pattern |
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10-20 |
surface treatment |